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Norm
ISO 21466:2019
Ausgabedatum: 2019 12 13
Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-SEM
This document specifies the structure model with related parameters, file format and fitting procedure for characterizing critical dimension (CD) values for wafer and pho...
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Herausgeber:
International Organization for Standardization
Format:
Digital | 47 Seiten
Sprache:
Englisch
ICS
This document specifies the structure model with related parameters, file format and fitting procedure for characterizing critical dimension (CD) values for wafer and photomask by imaging with a critical dimension scanning electron microscope (CD-SEM) by the model-based library (MBL) method. The method is applicable to linewidth determination for specimen, such as, gate on wafer, photomask, single isolated or dense line feature pattern down to size of 10 nm.
ISO 21466:2019
2019 12 13
Microbeam analysis — Scanning electron microscopy — Method for evaluating critical dimensions by CD-...
Norm
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