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Norm

ISO 13084:2018

Ausgabedatum: 2018 11 15

Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytica...
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Herausgeber:
International Organization for Standardization
Format:
Digital | 15 Seiten
Sprache:
Englisch

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

ISO 13084:2018
2018 11 15
Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a ti...
Norm
ISO 13084:2011
2011 05 05
Surface chemical analysis — Secondary-ion mass spectrometry — Calibration of the mass scale for a ti...
Norm