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Norm

OVE EN 62047-26

Ausgabedatum: 2017 01 01

Semiconductor devices - Micro-electromechanical devices -- Part 26: Description and measurement methods for micro trench and needle structures (IEC 62047-26:2016) (english version)

Gültig
OVE EN 62047-26
2017 01 01
Semiconductor devices - Micro-electromechanical devices -- Part 26: Description and measurement met...
Norm