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Norm

ÖVE/ÖNORM EN 62047-11

Ausgabedatum: 2014 06 01

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (IEC 62047-11:2013) (english version)

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ÖVE/ÖNORM EN 62047-11
2014 06 01
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of l...
Norm