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Norm
IEC 60204-33:2009 Ed. 1.0
Ausgabedatum: 2009 12 10
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test ...
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Herausgeber:
International Electrotechnical Commission
Format:
Digital | 247 Seiten
Sprache:
Englisch
Fachgebiete
Mechanical & plant engineering, Industrial automation systems, Industrial robots. Manipulators
Electric & lighting engineering, Electricity. Magnetism., Electrical engineering in general
Electric & lighting engineering, Safety of machinery, Safety of machinery
Safety, Safety of machinery, Safety of machinery
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.